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INFORMATION

Jul. 17, 2019

New Product Release: Thin-film Pressure Switch "PAS91 series"

Thin-film pressure switch "PAS91"
Thank you very much for your continuous support.

Recently, we launched the thin film pressure switch "PAS91 series" that can be used for semiconductor manufacturing equipment.

This series offers a wide range of pressure ranges, outputs (analog output and relay output, transistor open-collector output) and fittings, and can be used in a wide range of applications.

As a main target market, it is suitable for safety interlock for process chamber.

Features

Absolute pressure switch designed for safety interlock
Analog output (1-5V, 0-5V, 0-10V) + Switch output (Relay or Open collector)
SUS316L diaphragm
Electropolishing finish (optional)
Tested for conformance to UL991 (Third party test report available)

Specifications

Rated pressure range 14.5 psi abs (750 Torr · mmHg abs)
50.8 psi abs (2625 Torr · mmHg abs)
72.5 psi abs (3750 Torr · mmHg abs)
101.5 psi abs (5250 Torr · mmHg abs)
Material of wetted surface SUS316L
Fitting Gasket joint (9/16-18UNF)
Supply voltage 24 VDC ±10%

*Product details please click here.

INFORMATION(A BUSINESS YEAR)

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